By Francis F. Chen
Plasma processing of semiconductors is an interdisciplinary box requiring wisdom of either plasma physics and chemical engineering. the 2 authors are specialists in every one of those fields, and their collaboration leads to the merging of those fields with a standard terminology. uncomplicated plasma suggestions are brought painlessly to people who have studied undergraduate electromagnetics yet have had no past publicity to plasmas. Unnecessarily distinct derivations are passed over; but the reader is resulted in comprehend in a few intensity these suggestions, comparable to the constitution of sheaths, which are vital within the layout and operation of plasma processing reactors. Physicists now not acquainted with low-temperature plasmas are brought to chemical kinetics, floor technological know-how, and molecular spectroscopy. the cloth has been condensed to fit a nine-week graduate path, however it is enough to convey the reader modern on present difficulties similar to copper interconnects, low-k and high-k dielectrics, and oxide harm. scholars will savour the web-style structure with considerable colour illustrations contrary the textual content, with considerable room for notes.
This brief publication is perfect for brand new employees within the semiconductor who are looking to be pointed out to hurry with minimal attempt. it's also appropriate for Chemical Engineering scholars learning plasma processing of fabrics; Engineers, physicists, and technicians getting into the semiconductor who need a speedy evaluate of using plasmas within the undefined.
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